Specific contact resistance of ohmic contacts to n-type SiC membranes
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چکیده
منابع مشابه
Specific contact resistance measurements of ohmic contacts to semiconducting diamond
A simplified version of the specific contact resistance measurement scheme of G. K. Reeves [Solid State Electronics 23, 487 (1980)] has been developed. Its applicability to semiconducting diamond is demonstrated using four sample types: epitaxial films doped to mid 1019 acceptors/cm3 on (100) and (110) type IIa substrates; type IIb diamonds 0.25 mm thick, and type IIb diamonds thinned to 0.035-...
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ژورنال
عنوان ژورنال: MRS Proceedings
سال: 2011
ISSN: 0272-9172,1946-4274
DOI: 10.1557/opl.2011.1202